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Amorphous Silicon Carbide Thin Films
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Amorphous Silicon Carbide Thin Films : Deposition, Characterization, Etching & Piezoresistive Sensors Applications

Book Details

Format Paperback / Softback
ISBN-10 1613247745
ISBN-13 9781613247747
Publisher Nova Science Publishers Inc
Imprint Nova Science Publishers Inc
Country of Manufacture US
Country of Publication GB
Publication Date Jan 12th, 2012
Print length 118 Pages
Weight 196 grams
Dimensions 23.30 x 16.70 x 0.70 cms
Product Classification: Materials science
Ksh 10,450.00
Not available 0 in stock

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Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterisation and processing of crystalline SiC films. However, few works have investigated the potential of amorphous silicon carbide (a-SiC) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.

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