Atomic Layer Deposition for Semiconductors
Softcover reprint of the original 1st ed. 2014
Book Details
Format
Paperback / Softback
ISBN-10
1489979433
ISBN-13
9781489979438
Edition
Softcover reprint of the original 1st ed. 2014
Publisher
Springer-Verlag New York Inc.
Imprint
Springer-Verlag New York Inc.
Country of Manufacture
US
Country of Publication
GB
Publication Date
Aug 23rd, 2016
Print length
263 Pages
Weight
482 grams
Dimensions
15.50 x 23.40 x 1.80 cms
Ksh 26,800.00
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This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. The section on ALD for logic devices covers both front-end of the line processes and back-end of the line processes.
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
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