Atomic Layer Deposition for Semiconductors

Name: Atomic Layer Deposition for Semiconductors
Brand: Springer-Verlag New York Inc.
SKU: 9781489979438
Price: 26800 KES
Availability: OutOfStock
ISBN: 9781489979438

Softcover reprint of the original 1st ed. 2014

Book Details

Format Paperback / softback

ISBN-10 1489979433

ISBN-13 9781489979438

Edition Softcover reprint of the original 1st ed. 2014

Publisher Springer-Verlag New York Inc.

Imprint Springer-Verlag New York Inc.

Country of Manufacture US

Country of Publication GB

Publication Date Aug 23rd, 2016

Print length 263 Pages

Weight 482 grams

Dimensions 15.50 x 23.40 x 1.80 cms

Product Classification: Electrochemistry & magnetochemistry Electrochemistry and magnetochemistry Energy technology & engineering Energy technology and engineering Electrical engineering Electronics engineering Electronic devices & materials Electronic devices and materials Computer hardware

KSh 26,800.00

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This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. The section on ALD for logic devices covers both front-end of the line processes and back-end of the line processes.

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

Get Atomic Layer Deposition for Semiconductors by Cheol Seong Hwang at the best price and quality guaranteed only at Werezi Africa's largest book ecommerce store. The book was published by Springer-Verlag New York Inc. and it has 263 pages.