Beam Technologies for Integrated Processing

by Commission on Engineering and Technical Systems , Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems , Division on Engineering and Physical Sciences , National Materials Advisory Board , National Research Council

Book Details

Format Paperback / Softback

ISBN-10 0309046351

ISBN-13 9780309046350

Publisher National Academies Press

Imprint National Academies Press

Country of Manufacture GB

Country of Publication GB

Publication Date Feb 1st, 1992

Print length 106 Pages

Product Classification: Production engineering Laser technology & holography

Ksh 8,100.00

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Beam technologies play an important role in microelectronic component fabrication. This volume identifies various beam technologies and their applications in electronics and other manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.

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