Chemical-Mechanical Polishing – Fundamentals and Challenges: Volume 566
Book Details
Format
Hardback or Cased Book
Book Series
MRS Proceedings
ISBN-10
1558994734
ISBN-13
9781558994737
Publisher
Materials Research Society
Imprint
Materials Research Society
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Feb 10th, 2000
Print length
281 Pages
Weight
591 grams
Dimensions
23.40 x 15.70 x 2.30 cms
Product Classification:
Materials scienceSemi-conductors & super-conductors
Ksh 6,500.00
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This book brings together many of the active players in the field to focus on the interdisciplinary nature of these challenges. It reflects, to some extent, the role played by both academic institutions and multinational corporations in opening up the frontiers in the field of CMP for wider dissemination. Both experimental and theoretical contributions are included.
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