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CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications
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CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications

Book Details

Format Hardback
Book Series MRS Proceedings
ISBN-10 1605111287
ISBN-13 9781605111285
Publisher Materials Research Society
Imprint Materials Research Society
Country of Manufacture GB
Country of Publication GB
Publication Date Nov 19th, 2009
Print length 194 Pages
Weight 432 grams
Dimensions 16.00 x 23.60 x 1.80 cms
Product Classification: Materials science
KSh 17,800.00
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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.

Get CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications by Alexander A. Demkov at the best price and quality guaranteed only at Werezi Africa's largest book ecommerce store. The book was published by Materials Research Society and it has 194 pages.

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