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Design for Manufacturability with Advanced Lithography
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Design for Manufacturability with Advanced Lithography

Softcover reprint of the original 1st ed. 2016

Book Details

Format Paperback / Softback
ISBN-10 3319373935
ISBN-13 9783319373935
Edition Softcover reprint of the original 1st ed. 2016
Publisher Springer International Publishing AG
Imprint Springer International Publishing AG
Country of Manufacture CH
Country of Publication GB
Publication Date Aug 23rd, 2016
Print length 164 Pages
Ksh 8,100.00
Werezi Extended Catalogue 0 in stock

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This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms/methodologies to resolve issues in modern design for manufacturability problems with advanced lithography. Unlike books that discuss DFM from the product level or physical manufacturing level, this book describes DFM solutions from a circuit design level, such that most of the critical problems can be formulated and solved through combinatorial algorithms.

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