EUV Lithography
by
Vivek Bakshi
Book Details
Format
Hardback or Cased Book
ISBN-10
0470471557
ISBN-13
9780470471555
Publisher
John Wiley & Sons Inc
Imprint
John Wiley & Sons Inc
Country of Manufacture
US
Country of Publication
GB
Publication Date
Jan 16th, 2009
Print length
702 Pages
Weight
1,582 grams
Dimensions
25.90 x 19.10 x 4.50 cms
Product Classification:
Electronics & communications engineering
Ksh 20,500.00
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EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
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