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Extreme Ultraviolet Lithography

By: Harry J. Levinson (Author)

Extended Catalogue

Ksh 17,550.00

Format: Paperback or Softback

ISBN-13: 9781510639393

Publisher: SPIE Press

Publication Date: Dec 30th, 2020

Weight: 440 grams

Dimension: 17.60 x 25.20 x 1.60 cms

Category: Circuits & components

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Covers the many aspects of lithographic technology that needed to be addressed in order to make EUV lithography ready for high-volume manufacturing: exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Each topic is approached from the perspective of a practicing lithographer.

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