Fundamental Principles of Optical Lithography : The Science of Microfabrication
by
Chris Mack
Book Details
Format
Hardback or Cased Book
ISBN-10
0470018933
ISBN-13
9780470018934
Publisher
John Wiley & Sons Inc
Imprint
Wiley-Interscience
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Nov 16th, 2007
Print length
544 Pages
Weight
1,140 grams
Dimensions
24.90 x 17.10 x 3.70 cms
Product Classification:
Mechanical engineering & materialsApplied optics
Ksh 31,650.00
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Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
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