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Fundamental Principles of Optical Lithography

By: Chris (Lithoguru.com) Mack (Author)

2 in stock

Ksh 13,400.00

Format: Paperback or Softback

ISBN-13: 9780470727300

Publisher: John Wiley & Sons Inc

Publication Date: Nov 16th, 2007

Weight: 916 grams

Dimension: 17.40 x 24.70 x 2.90 cms

Category: MECHANICAL ENGINEERING & MATERIALS

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Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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