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Fundamentals of Microelectromechanical Systems (MEMS)
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Fundamentals of Microelectromechanical Systems (MEMS)

Book Details

Format Hardback or Cased Book
ISBN-10 1264257589
ISBN-13 9781264257584
Publisher McGraw-Hill Education
Imprint McGraw-Hill Education
Country of Manufacture US
Country of Publication GB
Publication Date Jun 2nd, 2021
Print length 416 Pages
Weight 900 grams
Dimensions 19.40 x 24.40 x 3.00 cms
Ksh 17,650.00
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Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product. A complete guide to MEMS engineering, fabrication, and applicationsThis comprehensive engineering guide shows, step by step, how to incorporate cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality in your designs. Written by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest technologies and methods. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Readers will also take a look at the future of MEMS in the workforce and explore MEMS research and development. Coverage includes:Basic microfabricationMicromachiningTransduction principlesRF and optical MEMSMechanics and inertial sensorsThin film properties and SAW/BAW sensorsPressure sensors and microphonesPiezoelectric filmsMaterial properties expressed as tensorMicrofluidic systems and BioMEMSPower MEMSElectronic noises, interface circuits, and oscillators
Publisher''s Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product.

A complete guide to MEMS engineering, fabrication, and applications

This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality in your designs. Written by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest technologies and methods. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Readers will also take a look at the future of MEMS in the workforce and explore MEMS research and development.

Coverage includes:

  • Basic microfabrication
  • Micromachining
  • Transduction principles
  • RF and optical MEMS
  • Mechanics and inertial sensors
  • Thin film properties and SAW/BAW sensors
  • Pressure sensors and microphones
  • Piezoelectric films
  • Material properties expressed as tensor
  • Microfluidic systems and BioMEMS
  • Power MEMS
  • Electronic noises, interface circuits, and oscillators





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