Green Etching Techniques for MEMS Applications : Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems
by
Kaiying Wang
Book Details
Format
Hardback or Cased Book
ISBN-10
1041144962
ISBN-13
9781041144960
Publisher
Taylor & Francis Ltd
Imprint
CRC Press
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Dec 18th, 2025
Print length
122 Pages
Weight
410 grams
Ksh 15,100.00
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Green Etching Techniques for MEMS Applications delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS).
Green Etching Techniques for MEMS Applications delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS).
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