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Introduction to Semiconductor Manufacturing Technology
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Introduction to Semiconductor Manufacturing Technology

Second Edition

Book Details

Format Paperback / Softback
Book Series Press Monographs
ISBN-10 1510616535
ISBN-13 9781510616530
Edition Second Edition
Publisher SPIE Press
Imprint SPIE Press
Country of Manufacture US
Country of Publication GB
Publication Date Nov 30th, 2012
Print length 698 Pages
Product Classification: Applied optics
Ksh 18,550.00
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Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.
IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.

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