Ion Implantation and Annealing Applications, Science and Technology : Contributions from IIT School, Edition 2024
Book Details
Format
Hardback or Cased Book
Book Series
Topics in Applied Physics
ISBN-10
3032100070
ISBN-13
9783032100078
Publisher
Springer Nature Switzerland AG
Imprint
Springer Nature Switzerland AG
Country of Manufacture
GB
Country of Publication
GB
Publication Date
May 30th, 2026
Print length
628 Pages
Product Classification:
Electronic devices and materialsSemi-conductors & super-conductors
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It covers the history of integrated circuits, common applications in CMOS technology, ion sources, radiation damage, annealing of materials like silicon (Si), silicon carbide (SiC) and gallium nitride (GaN), and advances in cluster ion beam technology.
This book compiles the insights and teachings from the 2024 IIT School lectures, offering a comprehensive look at ion implantation and annealing in semiconductor manufacturing. It covers the history of integrated circuits, common applications in CMOS technology, ion sources, radiation damage, annealing of materials like silicon (Si), silicon carbide (SiC) and gallium nitride (GaN), and advances in cluster ion beam technology. This edition, enriched by expert contributions, serves as an essential reference for students and professionals in materials science and microelectronics.
Get Ion Implantation and Annealing Applications, Science and Technology by at the best price and quality guaranteed only at Werezi Africa's largest book ecommerce store. The book was published by Springer Nature Switzerland AG and it has pages.