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Materials and Failures in MEMS and NEMS

By: (Edited by) Atul Tiwari , (Edited by) Baldev Raj

Werezi Extended Catalogue
Delivery in 34 days

Ksh 30,400.00

Format: Hardback or Cased Book

ISBN-10: 1119083605

ISBN-13: 9781119083603

Publisher: John Wiley & Sons Inc

Imprint: Wiley-Scrivener

Country of Manufacture: US

Country of Publication: GB

Publication Date: Sep 28th, 2015

Print length: 432 Pages

Weight: 934 grams

Dimensions (height x width x thickness): 26.20 x 18.50 x 2.80 cms

Product Classification: Circuits & components

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.

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