Materials Processing by Cluster Ion Beams : History, Technology, and Applications
by
Isao Yamada
Book Details
Format
Paperback / Softback
ISBN-10
0367872293
ISBN-13
9780367872298
Publisher
Taylor & Francis Ltd
Imprint
CRC Press
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Dec 10th, 2019
Print length
260 Pages
Weight
480 grams
Ksh 9,200.00
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This book discusses the physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, the text describes the development of sources for producing cluster beams from solid materials, the engineering characteristics of gas cl
Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing.
Written by the originator of the gas cluster ion beam (GCIB) concept, this book:
- Offers an overview of ion beam technologies, from the discovery of monomer ions to the introduction of GCIBs
- Explores the development of sources for producing cluster beams from solid materials
- Describes the engineering characteristics of gas cluster ion beam equipment
- Covers cluster ion-solid surface interaction kinetics as well as sputtering, implantation, and ion-assisted deposition
- Details surface processing techniques for smoothing, shallow implantation, and preparation of high-quality thin films
- Introduces representative examples of emerging GCIB industrial applications
Materials Processing by Cluster Ion Beams: History, Technology, and Applications provides a deeper understanding of the importance of cluster ion beams and their applications.
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