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Metal Impurities in Silicon- and Germanium-Based Technologies
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Metal Impurities in Silicon- and Germanium-Based Technologies : Origin, Characterization, Control, and Device Impact

Softcover reprint of the original 1st ed. 2018

Book Details

Format Paperback / Softback
ISBN-10 3030067475
ISBN-13 9783030067472
Edition Softcover reprint of the original 1st ed. 2018
Publisher Springer Nature Switzerland AG
Imprint Springer Nature Switzerland AG
Country of Manufacture GB
Country of Publication GB
Publication Date Jan 30th, 2019
Print length 438 Pages
Ksh 27,000.00
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material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.

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