Micro and Nano Fabrication : Tools and Processes
2015 ed.
Book Details
Format
Hardback or Cased Book
ISBN-10
3662443945
ISBN-13
9783662443941
Edition
2015 ed.
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Imprint
Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Country of Manufacture
DE
Country of Publication
GB
Publication Date
Jan 20th, 2015
Print length
519 Pages
Weight
952 grams
Dimensions
24.00 x 16.40 x 3.10 cms
Ksh 19,800.00
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
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