Micro and Nano Fabrication : Tools and Processes

Name: Micro and Nano Fabrication
Brand: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
SKU: 9783662443941
Price: 19800 KES
Availability: OutOfStock
ISBN: 9783662443941

2015 ed.

by Hans H. Gatzen , Jürg Leuthold , Volker Saile

Book Details

Format Hardback

ISBN-10 3662443945

ISBN-13 9783662443941

Edition 2015 ed.

Publisher Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Imprint Springer-Verlag Berlin and Heidelberg GmbH & Co. K

Country of Manufacture DE

Country of Publication GB

Publication Date Jan 20th, 2015

Print length 519 Pages

Weight 952 grams

Dimensions 24.00 x 16.40 x 3.10 cms

Product Classification: Nanotechnology Precision instruments manufacture Precision engineering and manufacturing Engineering skills and trades Tool making Welding

KSh 19,800.00

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Get Micro and Nano Fabrication by Hans H. Gatzen, Jürg Leuthold at the best price and quality guaranteed only at Werezi Africa's largest book ecommerce store. The book was published by Springer-Verlag Berlin and Heidelberg GmbH & Co. KG and it has 519 pages.