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Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

By: (Author) Saburo Nonogaki , (Author) Toshio Ito , (Author) Ueno Takumi

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Ksh 46,800.00

Format: Hardback or Cased Book

ISBN-10: 0824799518

ISBN-13: 9780824799519

Publisher: Taylor & Francis Inc

Imprint: CRC Press Inc

Country of Manufacture: GB

Country of Publication: GB

Publication Date: Jun 25th, 1998

Print length: 336 Pages

Weight: 612 grams

Product Classification: Plastics & polymers technology
Circuits & components
Semi-conductors & super-conductors

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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

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