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Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

By: Saburo Nonogaki (Author) , Ueno Takumi (Author) , Toshio Ito (Author)

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Ksh 57,600.00

Format: Hardback or Cased Book

ISBN-13: 9780824799519

Publisher: Taylor & Francis Inc

Publication Date: Jun 25th, 1998

Dimension: 22.90 x 15.20 x 61.20 cms

Category: Plastics & polymers technology

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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

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