Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
Book Details
Format
Hardback or Cased Book
ISBN-10
0824799518
ISBN-13
9780824799519
Publisher
Taylor & Francis Inc
Imprint
CRC Press Inc
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Jun 25th, 1998
Print length
336 Pages
Weight
612 grams
Product Classification:
Plastics & polymers technologyCircuits & componentsSemi-conductors & super-conductors
Ksh 49,500.00
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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
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