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Nanopositioning Technologies
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Nanopositioning Technologies : Fundamentals and Applications

Softcover reprint of the original 1st ed. 2016

Book Details

Format Paperback / Softback
ISBN-10 3319795392
ISBN-13 9783319795393
Edition Softcover reprint of the original 1st ed. 2016
Publisher Springer International Publishing AG
Imprint Springer International Publishing AG
Country of Manufacture GB
Country of Publication GB
Publication Date Mar 30th, 2018
Print length 409 Pages
Ksh 16,200.00
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This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning.
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

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