Photomask Fabrication Technology
Book Details
Format
Hardback or Cased Book
ISBN-10
0071445633
ISBN-13
9780071445634
Publisher
McGraw-Hill Education - Europe
Imprint
McGraw-Hill Professional
Country of Manufacture
US
Country of Publication
GB
Publication Date
Aug 16th, 2005
Print length
500 Pages
Weight
917 grams
Dimensions
23.10 x 15.20 x 4.50 cms
Product Classification:
Electrical engineering
Ksh 28,100.00
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Describes the science and technology of industrial photomask production, including fundamental principles, industrial production flows, and technological evolution and development. This book focuses on industrial applications rather than pure science. It is suitable for engineers developing microelectronic manufacturing processes.
Publisher''s Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product.
Photomasks are defect-free optical templates -- the printing masters for the fabrication of integrated circuits (ICs). When IC feature sizes fall below the exposure tool’s source wavelength, photomask fabrication becomes difficult: very strict mask critical dimension (CD) and feature placement specifications, intensive capital equipment investment, unique raw materials and applications, and special expertise requirements for photomask fabrication technologists are necessary to fabricate modern microelectronics. Thus the rapid recent growth of the field and the need for this book.
This text details the science and technology of industrial photomask production, including fundamental principles, industrial production flows, technological evolution and development, and state of the art technologies. Focusing on industrial applications rather than pure science, the goal of the book is to provide a comprehensive reference for any engineer developing microelectronic manufacturing processes
Photomasks are defect-free optical templates -- the printing masters for the fabrication of integrated circuits (ICs). When IC feature sizes fall below the exposure tool’s source wavelength, photomask fabrication becomes difficult: very strict mask critical dimension (CD) and feature placement specifications, intensive capital equipment investment, unique raw materials and applications, and special expertise requirements for photomask fabrication technologists are necessary to fabricate modern microelectronics. Thus the rapid recent growth of the field and the need for this book.
This text details the science and technology of industrial photomask production, including fundamental principles, industrial production flows, technological evolution and development, and state of the art technologies. Focusing on industrial applications rather than pure science, the goal of the book is to provide a comprehensive reference for any engineer developing microelectronic manufacturing processes
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