Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
2018 ed.
Book Details
Format
Hardback or Cased Book
Book Series
NanoScience and Technology
ISBN-10
3319762931
ISBN-13
9783319762937
Edition
2018 ed.
Publisher
Springer International Publishing AG
Imprint
Springer International Publishing AG
Country of Manufacture
CH
Country of Publication
GB
Publication Date
Apr 3rd, 2018
Print length
138 Pages
Ksh 16,200.00
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This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
Get Physical Design and Mask Synthesis for Directed Self-Assembly Lithography by at the best price and quality guaranteed only at Werezi Africa's largest book ecommerce store. The book was published by Springer International Publishing AG and it has pages.
