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Plasma Electronics
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Plasma Electronics : Applications in Microelectronic Device Fabrication

Book Details

Format Paperback / Softback
ISBN-10 1138034150
ISBN-13 9781138034150
Publisher Taylor & Francis Ltd
Imprint CRC Press
Country of Manufacture GB
Country of Publication GB
Publication Date Oct 26th, 2016
Print length 412 Pages
Weight 600 grams
Dimensions 15.70 x 23.50 x 2.60 cms
Ksh 14,950.00
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Emphasizing computational algorithms and techniques, this updated edition of a popular monograph provides a complete picture of plasma physics, computational methods, cutting-edge applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. This edition reflects recent progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process.


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