Rapid Thermal Processing
Book Details
Format
Hardback or Cased Book
ISBN-10
0080436129
ISBN-13
9780080436128
Publisher
Elsevier Science & Technology
Imprint
Elsevier Science Ltd
Country of Manufacture
US
Country of Publication
GB
Publication Date
Mar 17th, 1999
Print length
356 Pages
Weight
50 grams
Product Classification:
Other manufacturing technologiesMaterials scienceSemi-conductors & super-conductors
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Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. This work talks about Rapid Thermal Processing.
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