Run-to-Run Control in Semiconductor Manufacturing
Book Details
Format
Hardback or Cased Book
ISBN-10
0849311780
ISBN-13
9780849311789
Publisher
Taylor & Francis Inc
Imprint
CRC Press Inc
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Nov 30th, 2000
Print length
366 Pages
Weight
630 grams
Dimensions
24.20 x 15.80 x 2.20 cms
Product Classification:
Production engineeringSemi-conductors & super-conductors
Ksh 33,300.00
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0 in stock
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Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry''s widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
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