Silicon Carbide Microelectromechanical Systems For Harsh Environments
Book Details
Format
Hardback or Cased Book
ISBN-10
1860946240
ISBN-13
9781860946240
Publisher
Imperial College Press
Imprint
Imperial College Press
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Jun 30th, 2006
Print length
192 Pages
Weight
482 grams
Dimensions
23.30 x 16.40 x 2.00 cms
Product Classification:
Materials science
Ksh 17,650.00
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Describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. This book contains scientific information concerning SiC MEMS for harsh environments.
This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS.This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.
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