Silicon Micromachining
Book Details
Format
Paperback / Softback
ISBN-10
0521607671
ISBN-13
9780521607674
Publisher
Cambridge University Press
Imprint
Cambridge University Press
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Aug 19th, 2004
Print length
420 Pages
Weight
773 grams
Dimensions
24.70 x 18.90 x 2.20 cms
Product Classification:
Electronic devices & materials
Ksh 12,400.00
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This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. It is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).
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