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Silicon Micromachining

By: The Netherlands) Elwenspoek Enschede M. (University of Twente (Author) , The Netherlands) Jansen Enschede H. V. (University of Twente (Author)

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Ksh 8,900.00

Format: Paperback or Softback

ISBN-13: 9780521607674

Publisher: Cambridge University Press

Publication Date: Aug 19th, 2004

Weight: 773 grams

Dimension: 24.70 x 18.90 x 2.20 cms

Category: Electronic devices & materials

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This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. It is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).

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