Silicon-Molecular Beam Epitaxy : Volume I
by
E. Kasper
Book Details
Format
Hardback or Cased Book
ISBN-10
1315897512
ISBN-13
9781315897516
Publisher
Taylor & Francis Ltd
Imprint
CRC Press
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Dec 13th, 2017
Print length
260 Pages
Weight
640 grams
Product Classification:
Materials science
Ksh 36,000.00
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This subject is divided into two volumes. Volume I is on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation., whilst Volume II treats all aspects of heteroepitaxy.
This subject is divided into two volumes. Volume I is on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. Three chapters on homoepitaxy are followed by two chapters describing the different ways in which MBE may be applied to create insulator/Si stackings which may be used for three-dimensional circuits. The two remaining chapters in Volume I are devoted to device applications. The first three chapters of Volume II treat all aspects of heteroepitaxy with the exception of the epitaxial insulator/Si structures already treated in volume I.
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