The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit.
The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer’s view.
Get Silicon Semiconductor Technology by Ulrich Hilleringmann at the best price and quality guaranteed only at Werezi Africa's largest book ecommerce store. The book was published by Springer Fachmedien Wiesbaden and it has 264 pages.
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