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Silicon Technologies
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Silicon Technologies : Ion Implantation and Thermal Treatment

Book Details

Format Hardback or Cased Book
ISBN-10 1848212313
ISBN-13 9781848212312
Publisher ISTE Ltd and John Wiley & Sons Inc
Imprint ISTE Ltd and John Wiley & Sons Inc
Country of Manufacture GB
Country of Publication GB
Publication Date Jun 10th, 2011
Print length 368 Pages
Weight 676 grams
Dimensions 15.60 x 23.90 x 2.70 cms
Product Classification: Electronics engineering
Ksh 25,750.00
Werezi Extended Catalogue 0 in stock

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* Specifically in the field of microelectronics, the self-fulfilling power of Moore s Law has driven an amazing pace of technological advances * This book explains the fundamental physical and chemical rules in major front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion .
This book has been written to provide newly arrived engineers in a silicon foundry environment with a comprehensive background in the fundamental physical and chemical basis for major front-end silicon treatments, such as oxidation, epitaxy, ion implantation and impurities diffusion, as well as giving a survey of the major types of equipment used in integrated circuit (IC) chip foundries. Techniques include various forms of chemical vapor deposition (CVD), epitaxy, thin film technologies, lithography, masking, and other nanotechnologies. As well as the target audience, the book will also be of great interest to engineers and advanced students in all these and related fields of electrical engineering, materials science, and manufacturing.

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