Spectroscopic Ellipsometry – Principles and Applications : Principles and Applications
Book Details
Format
Hardback or Cased Book
ISBN-10
0470016086
ISBN-13
9780470016084
Publisher
John Wiley & Sons Inc
Imprint
John Wiley & Sons Inc
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Jan 26th, 2007
Print length
392 Pages
Weight
762 grams
Dimensions
23.50 x 15.70 x 2.60 cms
Product Classification:
Optical physics
Ksh 30,750.00
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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE).
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
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