Spectroscopic Ellipsometry – Principles and Applications : Principles and Applications

Name: Spectroscopic Ellipsometry – Principles and Applications
Brand: John Wiley & Sons Inc
SKU: 9780470016084
Price: 30750 KES
Availability: OutOfStock
ISBN: 9780470016084

by Hiroyuki Fujiwara

Book Details

Format Hardback

ISBN-10 0470016086

ISBN-13 9780470016084

Publisher John Wiley & Sons Inc

Imprint John Wiley & Sons Inc

Country of Manufacture GB

Country of Publication GB

Publication Date Jan 26th, 2007

Print length 392 Pages

Weight 762 grams

Dimensions 23.50 x 15.70 x 2.60 cms

Product Classification: Optical physics

KSh 30,750.00

Currently unavailable 0 in stock

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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Get Spectroscopic Ellipsometry – Principles and Applications by Hiroyuki Fujiwara at the best price and quality guaranteed only at Werezi Africa's largest book ecommerce store. The book was published by John Wiley & Sons Inc and it has 392 pages.