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Stress and Strain Engineering at Nanoscale in Semiconductor Devices
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Stress and Strain Engineering at Nanoscale in Semiconductor Devices

Book Details

Format Paperback / Softback
ISBN-10 036751933X
ISBN-13 9780367519339
Publisher Taylor & Francis Ltd
Imprint CRC Press
Country of Manufacture GB
Country of Publication GB
Publication Date Sep 25th, 2023
Print length 260 Pages
Weight 220 grams
Ksh 11,700.00
Werezi Extended Catalogue 0 in stock

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Based on 3D process and device simulations with mechanical stress simulations by finite element techniques, this book explains performance assessment of nanoscale devices with strained SiGe and other stressors. It explains the process-induced stress transfer and developments at 7nm technology and below node in the area of strain-engineered devices.
Based on 3D process and device simulations with mechanical stress simulations by finite element techniques, this book explains performance assessment of nanoscale devices with strained SiGe and other stressors. It explains the process-induced stress transfer and developments at 7nm technology and below node in the area of strain-engineered devices.

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