Sub-Half-Micron Lithography for ULSIs

Name: Sub-Half-Micron Lithography for ULSIs
Brand: Cambridge University Press
SKU: 9780521022347
Price: 7550 KES
Availability: OutOfStock
ISBN: 9780521022347

Book Details

Format Paperback / softback

ISBN-10 0521022347

ISBN-13 9780521022347

Publisher Cambridge University Press

Imprint Cambridge University Press

Country of Manufacture GB

Country of Publication GB

Publication Date Nov 10th, 2005

Print length 344 Pages

Weight 616 grams

Dimensions 24.50 x 17.90 x 1.80 cms

Product Classification: Computer science

KSh 7,550.00

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This book describes advanced techniques under development in Japan and elsewhere that represent the key to future semiconductor-device fabrication. Several important lithography methods, such as deep UV, X-ray, electron-beam, and focused ion-beam lithography are described in detail by experts. The principles underlying each of the techniques are illustrated at the beginning of each chapter.

Get Sub-Half-Micron Lithography for ULSIs by Katsumi Suzuki at the best price and quality guaranteed only at Werezi Africa's largest book ecommerce store. The book was published by Cambridge University Press and it has 344 pages.