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Ultra-Clean Technology Handbook

By: Japan) Ohmi Sendai Tadahiro (Tohoku University (Author)

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Ksh 90,000.00

Format: Hardback or Cased Book

ISBN-13: 9780824787530

Publisher: Taylor & Francis Inc

Publication Date: Jun 29th, 1993

Dimension: 24.60 x 17.40 x 181.40 cms

Category: Water supply & treatment

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Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int

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