Wafer Manufacturing : Shaping of Single Crystal Silicon Wafers
Book Details
Format
Hardback or Cased Book
ISBN-10
0470061219
ISBN-13
9780470061213
Publisher
John Wiley & Sons Inc
Imprint
John Wiley & Sons Inc
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Jan 29th, 2021
Print length
304 Pages
Weight
686 grams
Dimensions
25.10 x 17.50 x 2.60 cms
Product Classification:
Semi-conductors & super-conductors
Ksh 18,900.00
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Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques.
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