Computational Lithography
Book Details
Format
Hardback or Cased Book
Book Series
Wiley Series in Pure and Applied Optics
ISBN-10
047059697X
ISBN-13
9780470596975
Publisher
John Wiley & Sons Inc
Imprint
John Wiley & Sons Inc
Country of Manufacture
SG
Country of Publication
GB
Publication Date
Aug 6th, 2010
Print length
256 Pages
Weight
508 grams
Dimensions
24.10 x 16.00 x 1.80 cms
Product Classification:
Circuits & components
Ksh 19,050.00
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This is the first book to address the optimization of resolution enhancement techniques in optical lithography. It provides an in-depth discussion of RET tools that use model-based mathematical optimization approaches.
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