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Interlayer Dielectrics for Semiconductor Technologies

By: Shyam P Murarka (Author) , Moshe Eizenberg (Author) , Ashok K Sinha (Author)

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Format: Hardback or Cased Book

ISBN-13: 9780125112215

Publisher: Elsevier Science Publishing Co Inc

Publication Date: Oct 13th, 2003

Dimension: 24.00 x 16.50 x 104.30 cms

Category: Semi-conductors & super-conductors

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Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. This work covers the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation. It brings together the science and technology of interlayer dielectrics materials.

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