Materials and Processes for Submicron Technologies
Book Details
Format
Hardback
ISBN-10
008043617X
ISBN-13
9780080436173
Publisher
Elsevier Science & Technology
Imprint
Elsevier Science Ltd
Country of Manufacture
US
Country of Publication
GB
Publication Date
Nov 3rd, 1999
Print length
180 Pages
Weight
210 grams
Product Classification:
Circuits & componentsElectronics: circuits and components
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The European Materials Society decided to hold a Symposium entitled Materials and Processes for Submicron Technologies in June 16-19, 1998, within the yearly E-MRS Spring Meeting in Strasbourg, France. This title presents the articles which represent the 40 papers accepted for this particular E-MRS Meeting (Symposium N).
The European Materials Society decided to hold a Symposium entitled Materials and Processes for Submicron Technologies in June 16-19, 1998, within the yearly E-MRS Spring Meeting in Strasbourg, France. The purpose of this meeting was to discuss the results of the advances in microelectronic devices directly relating to the reduction in size of features of the devices down to submicron size. When electronic materials are patterned to these small sizes, their physico-chemical properties show many aspects (interdiffusion, electromigration, etc.), many of these not well known yet. The articles presented in this volume, 28 in number, are representative of the 40 papers accepted for this particular E-MRS Meeting (Symposium N).
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