Plasma Processes for Semiconductor Fabrication
Book Details
Format
Paperback / Softback
ISBN-10
0521018005
ISBN-13
9780521018005
Publisher
Cambridge University Press
Imprint
Cambridge University Press
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Sep 29th, 2005
Print length
232 Pages
Weight
414 grams
Dimensions
25.40 x 17.80 x 1.40 cms
Product Classification:
Semi-conductors & super-conductors
Ksh 12,950.00
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Self-contained book providing an up-to-date description of plasma etching and deposition in semiconductor fabrication. Presents the basic physics and chemistry of these processes, and shows how they can be accurately modelled. Suitable as a graduate-level textbook, and will also be a useful reference for practising engineers in the semiconductor industry.
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