Plasma Processes for Semiconductor Fabrication
Book Details
Format
Hardback or Cased Book
ISBN-10
0521591759
ISBN-13
9780521591751
Publisher
Cambridge University Press
Imprint
Cambridge University Press
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Jan 28th, 1999
Print length
232 Pages
Weight
650 grams
Dimensions
25.90 x 18.00 x 1.80 cms
Product Classification:
Semi-conductors & super-conductors
Ksh 22,500.00
Manufactured on Demand
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Self-contained book providing an up-to-date description of plasma etching and deposition in semiconductor fabrication. Presents the basic physics and chemistry of these processes, and shows how they can be accurately modelled. Suitable as a graduate-level textbook, and will also be a useful reference for practising engineers in the semiconductor industry.
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